Thesis-1997-Samuels.pdf (9.45 MB)
Serial laser lithography for efficient manufacture of universal microstructures
thesis
posted on 2012-12-14, 10:09 authored by Uve SamuelsThe technique of microstructuring revolutionises all classical fields of engineering like
electronics, optics and mechanics. In order to manufacture a microstructure in large quantities
and at a reasonable price, master elements or masks will be formed that can be duplicated in a
highly efficient process. Further development in technology leads, on the one hand, to further
reduction of possible dimensions of structures down to the range of sub-nano technology and,
on the other hand, to the development of more flexible systems in using more reasonably
priced technologies for the structuring in the classical micrometre range, which in turn opens
a much larger field of use.
This study examines the use of serial laser lithography for efficient manufacture of universal
microstructures. To facilitate this, a laser beam writer or so-called Laser Pattern Generator
(LPG) was developed and described here as well as in a previous work[Samu96a]. The laser
beam writer uses a precise positioning system for the movement of a substrate for material
processing using a focussed laser beam. This system permits the production of structures with
dimensions down to 0.5 μm which can be used in several application fields. This was
systematically analysed for optimisation of the production process. Based on the achieved
results, a computer-aided simulation system for process parameter determination and
optimisation was developed that may be used in order to minimise the experimental effort in
LPG manufacturing. The total production process and the individual optimising steps are
illustrated by the manufacture of different microstructures.
Because of the high reproducibility in manufacturing different structure types and, compared
with other manufacturing methods, the low equipment and manufacturing effort, serial laser
lithography is an efficient process for the microstructuring of universal microstructures down
to the dimensions in the micrometre range.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Publisher
© Uve SamuelsPublication date
1997Notes
A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy of Loughborough University.Language
- en