Chris2012PRSrev.pdf (2.31 MB)
Modelling the sputtering of Au surfaces using a multi time-scale technique
journal contribution
posted on 2013-03-08, 15:23 authored by Chris Scott, Roger SmithWe present results from an atomistic computer
simulation model of the sputtering of gold crystal
surfaces under 500 eV ion bombardment by Au and
Ar ions for doses up to 1014 ions cm−2. The multi
time-scale technique uses molecular dynamics to
calculate the fast ballistic collision processes in the
early stages of the cascade, whereas an on-the fly
kinetic Monte Carlo technique is used to model the
relaxation and diffusion processes between successive
ion impacts when the defect motion has begun to
be dominated by rare events. The results indicate
a large amount of crystalline recovery between
impacts, some facetting of the crystal surfaces but
no large sub-surface defect accumulation. Because of
this recovery process, sputtering yields and energy
distributions are in good agreement with those
obtained assuming a perfect crystal surface and also
with those experimentally measured.
History
School
- Science
Department
- Mathematical Sciences
Citation
SCOTT, C. and SMITH, R., 2013. Modelling the sputtering of Au surfaces using a multi time-scale technique. Proceedings of the Royal Society A - Mathematical, Physical and Engineering Sciences, 469, 2150, 20120480, 14pp. http://dx.doi.org/10.1098/rspa.2012.0480Publisher
© The Author(s) Published by the Royal SocietyVersion
- AM (Accepted Manuscript)
Publication date
2013Notes
This article was published in the journal, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences [© The Author(s). Published by the Royal Society] and the definitive version is available at: http://dx.doi.org/10.1098/rspa.2012.0480ISSN
1364-5021Publisher version
Language
- en