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Physical vapour deposition of thin films for use in superconducting RF cavities

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conference contribution
posted on 2015-11-18, 14:20 authored by Stuart Wilde, Reza Valizadeh, O.B. Malyshev, G.B.G. Stenning, A. Hannah, D.O. Malyshev, S. Pattalwar, Boris Chesca
The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction and DC SQUID magnetometry.

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School

  • Science

Department

  • Physics

Published in

6th International Particle Accelerator Conference http://accelconf.web.cern.ch/AccelConf/IPAC2015/papers/wepha059.pdf

Volume

WEPHA059

Pages

3249 - 3252 (4)

Citation

WILDE, S. ... et al, 2015. Physical vapour deposition of thin films for use in superconducting RF cavities. IN: Proceedings of the 6th International Particle Accelerator Conference IPAC2015, 3rd-8th May 2015, Richmond, Virginia, USA. JACoW, pp. 3249 - 3252.

Publisher

JACoW

Version

  • VoR (Version of Record)

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution 3.0 Unported (CC BY 3.0) licence. Full details of this licence are available at: http://creativecommons.org/licenses/by/3.0/

Publication date

2015

Notes

This is a conference paper published by JACoW and distributed under the terms of the Creative Commons Attribution 3.0 license (CC-BY 3.0).

ISBN

9783954501687

Language

  • en

Location

Greater Richmond Convention Center in Richmond, VA, USA

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