MR 2015 for LUPIN.pdf (1.36 MB)
Multiphysics modeling approach for micro electro-thermo-mechanical actuator: failure mechanisms coupled analysis
journal contribution
posted on 2017-06-30, 08:13 authored by Jinling Wang, Shengkui Zeng, Vadim SilberschmidtVadim Silberschmidt, Jianbin GuoThe lifetime of micro electro-thermo-mechanical actuators with complex electro-thermo-mechanical coupling mechanisms can be decreased significantly due to unexpected failure events. Even more serious is the fact that various failures are tightly coupled due to micro-size and multi-physics effects. Interrelation between performance and potential failures should be established to predict reliability of actuators and improve their design. Thus, a multiphysics modeling approach is proposed to evaluate such interactive effects of failure mechanisms on actuators, where potential failures are pre-analyzed via FMMEA (Failure Modes, Mechanisms, and Effects Analysis) tool for guiding the electro-thermo-mechanical-reliability modeling process. Peak values of temperature, thermal stresses/strains and tip deflection are estimated as indicators for various failure modes and factors (e.g. residual stresses, thermal fatigue, electrical overstress, plastic deformation and parameter variations). Compared with analytical solutions and experimental data, the obtained simulation results were found suitable for coupled performance and reliability analysis of micro actuators and assessment of their design.
Funding
J. Wang would like to thank the Chinese Scholarship Council, China, for financial assistance.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
Microelectronics ReliabilityCitation
WANG, J. ... et al., 2015. Multiphysics modeling approach for micro electro-thermo-mechanical actuator: Failure mechanisms coupled analysis. Microelectronics Reliability, 55 (5), pp.771-782.Publisher
© ElsevierVersion
- AM (Accepted Manuscript)
Publisher statement
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/Publication date
2015ISSN
0026-2714Publisher version
Other identifier
S0026-2714(15)00032-3Language
- en