Focal position-controlled processing head for a laser pattern generator (LPG) for flexible micro-structuring

In micro-structuring processes a direct structuring of the substrate is, in most cases, not possible and therefore the profile is first obtained in photo resist and then, in a second step, transferred into the substrate. The resist structuring can be performed using the flexible characteristics of a laser pattern generator (LPG). In these processes, there is a beneficial relationship between the apparatus/equipment expense and the obtainable processing results. For a reproduceable processing result in all micro structuring tasks, good reproducibility of all process relevant parameters is required. In the application of a laser pattern generator, precise control of the focal position of the strongly focussed laser beam relative to the processing surface must be maintained. [Continues.]