Thesis-1985-Duncan.pdf (8 MB)
Ion erosion in surface analysis
thesis
posted on 2018-01-10, 09:56 authored by S. DuncanLow energy ion bombardment is a process used in surface analysis and in
the electronics and telecommunications industries. Techniques such as Auger
Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and
Secondary Ion Mass Spectroscopy (SIMS) employ ion bombardment for surface
cleaning and for the provision of composition-depth profiles. [Continues.]
Funding
AERE Harwell. SERC.
History
School
- Science
Department
- Physics
Publisher
© S. DuncanPublisher statement
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 2.5 Generic (CC BY-NC-ND 2.5) licence. Full details of this licence are available at: http://creativecommons.org/licenses/by-nc-nd/2.5/Publication date
1985Notes
A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.Language
- en