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Evaluation of the performance of tilt scanning interferometry for tomographic imaging and profilometry
journal contribution
posted on 2015-02-13, 16:21 authored by Bona S.H. Burlison, Pablo RuizPablo Ruiz, Jonathan HuntleyIn this paper we investigate the performance of Tilt Scanning Interferometry in tomographic imaging and profilometry applications, with an emphasis on the factors that limit the quality of image reconstruction. Depth resolution is mainly degraded by a frequency chirp that appears in the temporal interference signal when a large tilting range is scanned. It is shown through a numerical simulation that the chirp depends on the curvature of the illumination wavefront and also on the position of the pivot axis of the illumination beam. Data processing methods are proposed to overcome these limitations and their effects are illustrated with experimental measurements of opaque surfaces and a weakly scattering phantom with internal features. The effect of speckle decorrelation is also discussed.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
OPTICS COMMUNICATIONSVolume
285Issue
7Pages
1654 - 1661 (8)Citation
BURLISON, B.S.H., RUIZ, P.D. and HUNTLEY, J.M., 2012. Evaluation of the performance of tilt scanning interferometry for tomographic imaging and profilometry. Optics Communications, 285 (7), pp. 1654 - 1661.Publisher
© Elsevier B.V.Version
- VoR (Version of Record)
Publisher statement
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/Publication date
2012Notes
This article is closed access.ISSN
0030-4018Publisher version
Language
- en