Chesca_mopva104.pdf (847.2 kB)
Physical vapour deposition of NbTiN thin films for superconducting RF cavities.
conference contribution
posted on 2017-08-24, 09:45 authored by Stuart Wilde, Reza Valizadeh, O.B. Malyshev, G.B.G. Stenning, A. Hannah, S. Pattalwar, N. Pattalwar, N.P. Barradas, E. Alves, Boris ChescaThe production of superconducting coatings for radio frequency (RF) cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. The use of thin
films made from superconductors with thermodynamic critical field, Hc > HC(Nb), allows the possibility of multilayer superconductor – insulator – superconductor (SIS) films and accelerators that could operate at temperatures above 2 K. SIS films theoretically allow increased acceleration gradient due to magnetic shielding
of underlying superconducting layers [1] and higher operating temperature can reduce cost [2]. High impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering processes were used to deposit NbTiN thin films onto Si(100) substrate. The films were characterised using scanning electron microscopy (SEM), x-ray diffraction (XRD), Rutherford back-scattering spectroscopy (RBS)
and a four-point probe.
History
School
- Science
Department
- Physics
Published in
8th International Particle Accelerator Conference, IPAC2017 http://accelconf.web.cern.ch/AccelConf/ipac2017/Volume
MOPVA104Issue
T07Pages
1102 - 1104 (3)Citation
WILDE, S. ...et al., 2017. Physical vapour deposition of NbTiN thin films for superconducting RF cavities. IN: Arduini, G. ...et al. (eds.). Proceedings of the 8th International Particle Accelerator Conference, (IPAC2017), Copenhagen, Denmark, 14-19th May, pp. 1102 - 1104.Publisher
© The Authors. Published by JACoWVersion
- VoR (Version of Record)
Publisher statement
This work is made available according to the conditions of the Creative Commons Attribution 3.0 Unported (CC BY 3.0) licence. Full details of this licence are available at: http://creativecommons.org/licenses/by/3.0/Acceptance date
2017-05-19Publication date
2017Notes
This is an Open Access Article. It is published by JACoW under the Creative Commons Attribution 3.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/3.0/ISBN
9783954501823Publisher version
Language
- en