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The numerical modelling of focussed ion beam systems

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thesis
posted on 2018-01-29, 12:50 authored by Robert J. Amos
The work in this thesis examines the numerical modelling of focussed ion beam systems, with applications ranging from the surface analysis of materials by SIMS to microfabrication by ion beam lithography. An efficient and accurate computer programme has been developed and tested on medium sized machines in order to model the behaviour of beams of charged particles through electrostatic systems. [Continues.]

Funding

Science and Engineering Research Council and VG Ionex Ltd. (CASE award).

History

School

  • Science

Department

  • Mathematical Sciences

Publisher

© Robert J. Amos

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 2.5 Generic (CC BY-NC-ND 2.5) licence. Full details of this licence are available at: http://creativecommons.org/licenses/by-nc-nd/2.5/

Publication date

1987

Notes

A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.

Language

  • en

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    Mathematical Sciences Theses

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    Keywords

    untaggedMathematical Sciences not elsewhere classified

    Licence

    CC BY-NC-ND 2.5

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