Loughborough University
Leicestershire, UK
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Loughborough University

Loughborough University Institutional Repository

Browsing by Author Ward, Michael

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Issue DateTitleAuthor(s)
2016Plastic deformation of micromachined silicon diaphragms with a sealed cavity at high temperaturesRen, Juan; Ward, Michael; Kinnell, Peter; Craddock, Russell; Wei, Xueyong
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