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Title: Influence of ion assisted deposition on interface broadening in Fe/Al multilayers investigated by medium energy ion scattering
Authors: Al-Busaidi, M.S.
Bailey, P.
Noakes, T.C.Q.
Cropper, Michael D.
Keywords: Iron
Aluminium
Multilayer
MEIS
Magnetron
Depth profiling
Trilayer
Issue Date: 2009
Publisher: © Elsevier
Citation: AL-BUSAIDI, M.S. ... et al, 2009. Influence of ion assisted deposition on interface broadening in Fe/Al multilayers investigated by medium energy ion scattering. Vacuum, 83 (12), pp.1454-1458.
Abstract: Trilayers of Al/Fe/Al and Al/Fe multilayers produced by magnetron sputtering both with and without ion assistance have been depth profiled using Auger electron spectroscopy and medium energy ion scattering. Important differences are observed in the layer structure, with ion assisted deposition giving the narrowest Al/Fe interfaces and so maintaining the most clearly defined layer structure. Both types of sputtering result in some oxygen contamination that modeling shows to be associated with the highly reactive Al layers.
Description: This is the author’s version of a work that was accepted for publication in Vacuum. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published at: http://dx.doi.org/10.1016/j.vacuum.2009.06.002
Version: Accepted for publication
DOI: 10.1016/j.vacuum.2009.06.002
URI: https://dspace.lboro.ac.uk/2134/10741
Publisher Link: http://dx.doi.org/10.1016/j.vacuum.2009.06.002
http://www.elsevier.com/locate/vacuum
ISSN: 0042-207X
Appears in Collections:Published Articles (Physics)

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