+44 (0)1509 263171
Please use this identifier to cite or link to this item:
|Title: ||Influence of ion assisted deposition on interface broadening in Fe/Al multilayers investigated by medium energy ion scattering|
|Authors: ||Al-Busaidi, M.S.|
Cropper, Michael D.
|Issue Date: ||2009|
|Publisher: ||© Elsevier|
|Citation: ||AL-BUSAIDI, M.S. ... et al, 2009. Influence of ion assisted deposition on interface broadening in Fe/Al multilayers investigated by medium energy ion scattering. Vacuum, 83 (12), pp.1454-1458.|
|Abstract: ||Trilayers of Al/Fe/Al and Al/Fe multilayers produced by magnetron sputtering both with and without ion assistance have been depth profiled using Auger electron spectroscopy and medium energy ion scattering. Important differences are observed in the layer structure, with ion assisted deposition giving the narrowest Al/Fe interfaces and so maintaining the most clearly defined layer structure. Both types of sputtering result in some oxygen contamination that modeling shows to be associated with the highly reactive Al layers.|
|Description: ||This is the author’s version of a work that was accepted for publication in Vacuum. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published at: http://dx.doi.org/10.1016/j.vacuum.2009.06.002|
|Version: ||Accepted for publication|
|Publisher Link: ||http://dx.doi.org/10.1016/j.vacuum.2009.06.002|
|Appears in Collections:||Published Articles (Physics)|
Files associated with this item:
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.