AL-BUSAIDY, M.S., KUSMARTSEVA, O.E. and CROPPER, 2004. Pulsed laser deposition of metallic multilayers: the influence of laser power on microstructure. Applied Physics A - Materials Science and Processing, 79 (4-6), pp.1453-1456.
Multilayers of Co and Cu on Si(111) substrates have been produced by pulsed laser deposition at the second harmonic of a Nd:YAG laser (532 nm). The effect of varying the laser power on the film microstructure has been investigated using grazing incidence X-ray reflectivity measurements. Quantitative analysis of the reflectivity curves indicates that higher laser powers are associated with greater intermixing at the Co/Cu interfaces. Offset scans indicate that there is conformal roughness. The deposition process introduces some droplets into the layers, principally of Cu.
This article was accepted for publication in the journal Applied Physics A: Materials Science and Processing. The final publication is available at www.springerlink.com.