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Title: Areal texture and angle measurements of tilted surfaces using focus variation methods
Authors: Hiersemenzel, Florine
Petzing, Jon N.
Leach, Richard K.
Helmli, F.
Singh, Jagpal
Keywords: Areal
ISO 25178
Focus variation
Issue Date: 2012
Publisher: Universite de Savoie
Citation: HIERSEMENZEL, F. ... et al., 2012. Areal texture and angle measurements of tilted surfaces using focus variation methods. IN: Proceedings of the 3rd International Conference on Surface Metrology, Annecy, France, 21-23 March 2012, 5pp.
Abstract: Optical instruments for areal surface topography measurement have seen significant commercial development in the last five years, along with the ISO 25178 areal standard. Providing the user with confidence in new instruments depends on understanding instrument behavior and sources of error. Focus variation techniques rely on the inherent micro- or nano-scale roughness of a surface to allow acquisition of topography data. The work reported here has been examining the sensitivity of the focus variation technique to surface slope, using areal parameters to characterize surface roughness at extended slope values. The results illustrate links between instrument variables and slope characterization.
Description: This is an ICSM'12 conference paper. The website is at: http://www.polytech.univ-savoie.fr/index.php?id=icsm2012
Version: Accepted for publication
URI: https://dspace.lboro.ac.uk/2134/11559
Publisher Link: http://www.polytech.univ-savoie.fr/index.php?id=icsm2012
ISBN: 9782953616835
Appears in Collections:Conference Papers and Presentations (Mechanical, Electrical and Manufacturing Engineering)

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