The work in this thesis examines computational models of ion
erosion. It computes solutions to a non-linear wave equation which
governs the surface motion. by the method of characteristics. Some
experimental work on the rocking and rotation of samples of quartz which
are Jon-milled for use as surface acoustic wave resonators Is compared with
theoretical predictions. The computations pay particular attention to the
motion of edges and the development of edges on the surface as the
erosion proceeds. The thesis discussed secondary effects and examines
the problems generated by erosion In microelectronic device manufacture.
A line segment algorithm is also devised and programmed and
applied to the modelling of ion reflection.
Finally. a binary collision algorithm Is presented written recursively In
Algol 68 in order to describe the sputtering process In terms of Individual
events. The computed sputtering yields are then used in the simulations of
surface erosion described previously.
A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy of Loughborough University. This thesis is closed access for copyright reasons as it contains published articles.