MAKAROVSKY, O. ... et al., 2010. Direct laser writing of nanoscale light-emitting diodes. Advanced Materials, 22 (29), pp. 3176-3180.
Nanoscale light-emitting diodes (nanoLEDs) and arrays of nanoLEDs produced by laser controlled diffusion of interstitial manganese (Mni) donor ions out of the ferromagnetic semiconductor (GaMn)As towards the underlying layers of a quantum well heterostructure. The approach represents an alternative to deep etching for the creation of nanoscale current channels and nanoLEDs.