PETZING, J.N., COUPLAND,J.M. and LEACH, R.K., 2010. The measurement of rough surface topography using coherence scanning interferometry. NPL Measurement Good Practice Guide 116.
This guide describes good practice for the measurement and characterisation of rough surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light interferometry). It is aimed at users of coherence scanning interferometry for the optical measurement of surface texture within production and research environments. The general guidelines described herein can be applied to the measurement of rough surfaces exhibiting different types of surface topography. For the purpose of this guide, the definition of a rough surface is one that has features with heights ranging from approximately 10 nm to less than 100 µm
This is a Measurement Good Practice Guide and it is also available at: http://www.npl.co.uk/publications/The-measurement-of-rough-surface-topography-using-coherence-scanning-interferometry.
This Measurement Good Practice Guide has been produced and funded as part of the
Engineering & Physical Sciences Research Council (EPSRC) Grand Challenge