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Please use this identifier to cite or link to this item: https://dspace.lboro.ac.uk/2134/13271

Title: The measurement of rough surface topography using coherence scanning interferometry
Authors: Petzing, Jon N.
Coupland, Jeremy M.
Leach, Richard K.
Issue Date: 2010
Publisher: National Physical Laboratory / © Queen’s printer and Controller of HMSO
Citation: PETZING, J.N., COUPLAND,J.M. and LEACH, R.K., 2010. The measurement of rough surface topography using coherence scanning interferometry. NPL Measurement Good Practice Guide 116.
Abstract: This guide describes good practice for the measurement and characterisation of rough surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light interferometry). It is aimed at users of coherence scanning interferometry for the optical measurement of surface texture within production and research environments. The general guidelines described herein can be applied to the measurement of rough surfaces exhibiting different types of surface topography. For the purpose of this guide, the definition of a rough surface is one that has features with heights ranging from approximately 10 nm to less than 100 µm
Description: This is a Measurement Good Practice Guide and it is also available at: http://www.npl.co.uk/publications/The-measurement-of-rough-surface-topography-using-coherence-scanning-interferometry.
Sponsor: This Measurement Good Practice Guide has been produced and funded as part of the Engineering & Physical Sciences Research Council (EPSRC) Grand Challenge “Project 3D-Mintegration”.
Version: Published
URI: https://dspace.lboro.ac.uk/2134/13271
Publisher Link: http://www.npl.co.uk/publications/The-measurement-of-rough-surface-topography-using-coherence-scanning-interferometry.
ISSN: 1368-6550
Appears in Collections:Official Reports (Mechanical, Electrical and Manufacturing Engineering)

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