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Please use this identifier to cite or link to this item: https://dspace.lboro.ac.uk/2134/14048

Title: The mathematical modelling of focussed ion beam systems
Authors: Amos, Robert J.
Evans, G.A.
Smith, Roger
Issue Date: 1987
Publisher: © VNU Science Press
Citation: AMOS, R.J., EVANS, G.A. and SMITH, R., 1987. The mathematical modelling of focussed ion beam systems. Mathematical Engineering in Industry, 1 (3), pp. 191 - 213.
Abstract: Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography.
Description: Closed access. This article was published in the journal, Mathematical Engineering in Industry [© VNU Science Press].
Version: Published
URI: https://dspace.lboro.ac.uk/2134/14048
ISSN: 0169-121X
Appears in Collections:Closed Access (Maths)

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