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Reason: This item is currently closed access.
The mathematical modelling of focussed ion beam systems
journal contribution
posted on 2014-01-29, 10:19 authored by Robert J. Amos, G.A. Evans, Roger SmithComputer simulation of focused ion beam systems plays an important role in the design of many
scientific instruments. This paper describes a computational technique which has been developed for
medium sized computers and which has been applied to a number of instrument design applications . The
applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the
design of columns for ion beam lithography.
History
School
- Science
Department
- Mathematical Sciences
Citation
AMOS, R.J., EVANS, G.A. and SMITH, R., 1987. The mathematical modelling of focussed ion beam systems. Mathematical Engineering in Industry, 1 (3), pp. 191 - 213.Publisher
© VNU Science PressVersion
- VoR (Version of Record)
Publication date
1987Notes
Closed access. This article was published in the journal, Mathematical Engineering in Industry [© VNU Science Press].ISSN
0169-121XLanguage
- en