AMOS, R.J., EVANS, G.A. and SMITH, R., 1987. The mathematical modelling of focussed ion beam systems. Mathematical Engineering in Industry, 1 (3), pp. 191 - 213.
Computer simulation of focused ion beam systems plays an important role in the design of many
scientific instruments. This paper describes a computational technique which has been developed for
medium sized computers and which has been applied to a number of instrument design applications . The
applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the
design of columns for ion beam lithography.