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Please use this identifier to cite or link to this item: https://dspace.lboro.ac.uk/2134/14147

Title: Room temperature surface passivation of silicon for screen printed c-Si solar cells by HiTUS reactive sputter deposition
Authors: Claudio, Gianfranco
Kaminski, Piotr M.
Bass, Kevin
Walls, Michael
Issue Date: 2014
Publisher: © Elsevier
Citation: CLAUDIO, G. ... et al, 2014. Room temperature surface passivation of silicon for screen printed c-Si solar cells by HiTUS reactive sputter deposition. Applied Surface Science, 301, pp. 51–55.
Abstract: The dielectric coatings used on silicon solar cells serve a dual purpose: a surface passivation layer and as an antireflection coating. Silicon nitride films were deposited by sputtering, using a HiTUS technology, on crystalline silicon wafers. Films were deposited without substrate heating, which simplifies the deposition process, from a polycrystalline silicon target in a mixed ambient of Argon, Nitrogen and Hydrogen gasses. After the deposition, the minority carrier lifetime, refractive index and deposition rate were measured. Photo conductance decay measurements show that the minority carrier lifetime increased up to 26μs on a 40Ω/□ doped 1 Ω-cm p-type <100> Cz-Si pseudo square wafer (compared to 1μs measured for bare wafer) and up to 984μs for a double-side polished 3 Ω-cm Cz-Si wafer (from ~70μs measured for uncoated wafer). Spectroscopic ellipsometry measurements showed that the refractive index of the deposited films was 2.05 at λ=632.8nm; deposition rate was measured at 22.4nm/min. The films were used to prepare screen-printed c-Si solar cells. The resultant cells showed an efficiency of 15.14% with silicon nitride films grown without the use of silane or substrate heating.
Description: This article was published in the journal, Applied Surface Science [© Elsevier B.V.] and the definitive version is available at: http://dx.doi.org/doi:10.1016/j.apsusc.2014.01.207
Version: Accepted for publication
DOI: 10.1016/j.apsusc.2014.01.207
URI: https://dspace.lboro.ac.uk/2134/14147
Publisher Link: http://dx.doi.org/doi:10.1016/j.apsusc.2014.01.207
Appears in Collections:Published Articles (Mechanical, Electrical and Manufacturing Engineering)
Published Articles (CREST)

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