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Title: Metrology of silicon photovoltaic cells using coherence correlation interferometry
Authors: Maniscalco, Bianca
Kaminski, Piotr M.
Conroy, M.
Mansfield, D.
Yu, Y.
Bass, Kevin
Claudio, Gianfranco
Walls, Michael
Issue Date: 2011
Publisher: © IEEE
Citation: MANISCALCO, B. ... et al., 2011. Metrology of silicon photovoltaic cells using coherence correlation interferometry. IN: 37th IEEE Photovoltaic Specialists Conference (PVSC), Seattle, 19-24 June 2011, pp. 3370 - 3374.
Abstract: Surface metrology plays an important role in the development and manufacture of photovoltaic cells and modules. Coherence Correlation Interferometry (CCI) is a non-contacting surface metrology tool with potentially important applications in the characterization of photovoltaic devices. Its major advantages are that it is fast, non-destructive and it takes its data from a relatively large and hence representative area. A special mode, called “stitching x-y” can be used to provide information on a wider area, combining measurements taken in different zones of the sample. The technique is capable of providing surface roughness and step height measurements with sub-nanometre precision. It is also capable of measuring quantitatively surface texture and surface form in three dimensions and it now has a new capability to measure thin film and thick film thickness. CCI measurements are presented on a range of features on silicon photovoltaic cells including surface roughness, surface texture, the profile of laser grooves for buried contacts as well as the roughness and thickness of silicon nitride thin films. Complementary analysis using spectroscopic ellipsometry is also presented for verification. CCI is a sensitive, non-destructive metrology technique with potential use as an in-line quality assurance tool in the large scale production of photovoltaic modules.
Description: This conference paper [© IEEE] is also available at: http://www.ieee.org/conferences_events/. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Version: Accepted for publication
DOI: 10.1109/PVSC.2011.6186670
URI: https://dspace.lboro.ac.uk/2134/14666
Publisher Link: http://dx.doi.org/10.1109/PVSC.2011.6186670
ISSN: 0160-8371
Appears in Collections:Conference Papers and Contributions (CREST)

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