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Title: 1-D fluid model of atmospheric-pressure rf He+O2 cold plasmas: parametric study and critical evaluation
Authors: Yang, Aijun
Wang, Xiao-Hua
Rong, Ming-Zhe
Liu, Ding-Xin
Iza, Felipe
Kong, Michael G.
Issue Date: 2011
Publisher: © American Institute of Physics
Citation: YANG, A. ... et al, 2011. 1-D fluid model of atmospheric-pressure rf He+O2 cold plasmas: parametric study and critical evaluation. Physics of Plasmas, 18 (11), 113503.
Abstract: In this paper atmospheric-pressure rf He+O2 cold plasmas are studied by means of a 1-D fluid model. 17 species and 60 key reactions selected from a study of 250+ reactions are incorporated in the model.O + 2 , O − 3 , and O are the dominant positive ion, negative ion, and reactive oxygen species, respectively. Ground state O is mainly generated by electron induced reactions and quenching of atomic and molecular oxygen metastables, while three-body reactions leading to the formation of O2 and O3 are the main mechanisms responsible for O destruction. The fraction of input power dissipated by ions is ∼20%. For the conditions considered in the study ∼6% of the input power is coupled to ions in the bulk and this amount will increase with increasing electronegativity. Radial and electrode losses of neutral species are in most cases negligible when compared to gas phase processes as these losses are diffusion limited due to the large collisionality of the plasma. The electrode loss rate of neutral species is found to be nearly independent of the surface adsorption probability p for p > 0.001 and therefore plasma dosage can be quantified even if p is not known precisely.
Description: © 2011 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Physics of Plasmas, 18 (11), 113503 and may be found at: http://dx.doi.org/10.1063/1.3655441
Sponsor: This work was supported by the National Natural Science Foundation of China (No. 50907353), the Fundamental Research Funds for the Central Universities of China (No. xjj20100163), the State Key Laboratory of Electrical Insulation and Power Equipment (No. EIPE10310) and the Engineering Physical Science Research Council (UK).
Version: Published
DOI: 10.1063/1.3655441
URI: https://dspace.lboro.ac.uk/2134/16402
Publisher Link: http://dx.doi.org/10.1063/1.3655441
ISSN: 1070-664X
Appears in Collections:Published Articles (Mechanical, Electrical and Manufacturing Engineering)

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