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Tilt scanning interferometry: a numerical simulation benchmark for 3D metrology
journal contribution
posted on 2015-02-13, 16:06 authored by Gustavo E. Galizzi, Pablo RuizPablo Ruiz, Guillermo H. KaufmannTilt scanning interferometry (TSI) is a novel experimental technique that allows the measurement of multicomponent displacement fields inside the volume of a sample. In this paper, we present a simulation model that allows for the evaluation of the speckle fields recorded in TSI when this technique is applied to the analysis of semitransparent scattering materials. The simulation is based on the convolution of the optical impulsive response of the optical system and the incident field amplitude. Different sections of the simulated imaging system are identified and the corresponding optical impulsive responses are determined. To evaluate the performance of the proposed model, a known internal displacement field as well as the illumination and detection strategies in a real TSI system are numerically simulated. Then, the corresponding depth-resolved out-of-plane and in-plane changes of phase are obtained by means of the data processing algorithm implemented in a TSI system.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
APPLIED OPTICSVolume
48Issue
17Pages
3184 - 3191 (8)Citation
GALIZZI, G.E., RUIZ, P.D. and KAUFMANN, G.H., 2009. Tilt scanning interferometry: a numerical simulation benchmark for 3D metrology. Applied Optics, 48 (17), pp. 3184 - 3191.Publisher
© Optical Society of AmericaVersion
- VoR (Version of Record)
Publisher statement
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/Publication date
2009Notes
This article is closed access.ISSN
1559-128XPublisher version
Language
- en