ICPIG2011contribution_v1.pdf (678.32 kB)
Electron-anion separation in electronegative rf microdischarges
conference contribution
posted on 2015-05-21, 08:47 authored by Kirsty McKay, Ding-Xin Liu, Felipe IzaFelipe Iza, Ming-Zhe Rong, Michael G. KongSeveral types of double-layer structures have been reported previously in the literature and the
stratification of negatively charged species in electronegative discharges is a well known
phenomena. Here we report on the evolution of a different type of double layer structure found in
electronegative microplasmas. In these microdischarges, the electron ensemble oscillates between
the electrodes forming sheaths that are larger than half the discharge gap. As the electrons
oscillate, they move across and beyond a central electronegative core formed by anions. As a
result of their different motion, electrons and anions are completely separated and regions of
positive space charge form between the oscillating electron ensemble and the central
electronegative discharge.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
XXX International Conference on Ionized GasesCitation
MCKAY, K. ... et al., 2011. Electron-anion separation in electronegative rf microdischarges. IN: Proceedings of the XXX International Conference on Ionized Gases (ICPIG 2011), Belfast, UK, 28 August - 2 September 2011.Publisher
Queen's University BelfastVersion
- AM (Accepted Manuscript)
Publisher statement
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/Publication date
2011Notes
This is a conference paper.Publisher version
Language
- en