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Title: Electron-anion separation in electronegative rf microdischarges
Authors: McKay, Kirsty
Liu, Ding-Xin
Iza, Felipe
Rong, Ming-Zhe
Kong, Michael G.
Issue Date: 2011
Publisher: Queen's University Belfast
Citation: MCKAY, K. ... et al., 2011. Electron-anion separation in electronegative rf microdischarges. IN: Proceedings of the XXX International Conference on Ionized Gases (ICPIG 2011), Belfast, UK, 28 August - 2 September 2011.
Abstract: Several types of double-layer structures have been reported previously in the literature and the stratification of negatively charged species in electronegative discharges is a well known phenomena. Here we report on the evolution of a different type of double layer structure found in electronegative microplasmas. In these microdischarges, the electron ensemble oscillates between the electrodes forming sheaths that are larger than half the discharge gap. As the electrons oscillate, they move across and beyond a central electronegative core formed by anions. As a result of their different motion, electrons and anions are completely separated and regions of positive space charge form between the oscillating electron ensemble and the central electronegative discharge.
Description: This is a conference paper.
Version: Accepted for publication
URI: https://dspace.lboro.ac.uk/2134/17560
Publisher Link: http://mpserver.pst.qub.ac.uk/sites/icpig2011/264_C10_McKay.pdf
Appears in Collections:Conference Papers and Contributions (Mechanical, Electrical and Manufacturing Engineering)

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