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Title: Physical vapour deposition of thin films for use in superconducting RF cavities
Authors: Wilde, Stuart
Valizadeh, Reza
Malyshev, O.B.
Stenning, G.B.G.
Hannah, A.
Malyshev, D.O.
Pattalwar, S.
Chesca, Boris
Issue Date: 2015
Publisher: JACoW
Citation: WILDE, S. ... et al, 2015. Physical vapour deposition of thin films for use in superconducting RF cavities. IN: Proceedings of the 6th International Particle Accelerator Conference IPAC2015, 3rd-8th May 2015, Richmond, Virginia, USA. JACoW, pp. 3249 - 3252.
Abstract: The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction and DC SQUID magnetometry.
Description: This is a conference paper published by JACoW and distributed under the terms of the Creative Commons Attribution 3.0 license (CC-BY 3.0).
Version: Published
URI: https://dspace.lboro.ac.uk/2134/19514
Publisher Link: http://accelconf.web.cern.ch/AccelConf/IPAC2015/
ISBN: 9783954501687
Appears in Collections:Conference Papers (Physics)

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