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Title: Comparison of DC and RF sputtered aluminium-doped zinc oxide for photovoltaic applications
Authors: Isherwood, Patrick J.M.
Gona, Michael
Bowers, Jake W.
Neves, Nuno N.P.
Newbatt, Paul
Walls, Michael
Keywords: Wide band gap semiconductors
Conductive films
II-VI semiconductor materials
Thin films
Issue Date: 2015
Publisher: © IEEE
Citation: ISHERWOOD, P.J.M. ... et al., 2015. Comparison of DC and RF sputtered aluminium-doped zinc oxide for photovoltaic applications. IN: Proceedings of the IEEE 42nd Photovoltaic Specialist Conference (PVSC), New Orleans, USA, 14-19 June 2015, 5pp.
Abstract: AZO was sputter deposited using both RF and DC power supplies from a pre-formed ceramic AZO target with a 2 wt % aluminium oxide dopant concentration. The target was formed by hot pressing pre-doped nanoparticles produced using an emulsion detonation synthesis technique. AZO films were found to display good optical and electrical properties regardless of deposition technique. Increased temperatures above 200 °C were found to have a negative impact on the electrical properties, with a corresponding increase in infrared transmission. Visible transmission was found to be good (above 79 %) for all films except those deposited using DC power at room temperature. The DC sputtering process was stable and was found to approximately double the deposition rate with no corresponding drop in film quality for films deposited at moderate temperatures. This makes DC deposition more industrially attractive when process temperature is not a concern. For room temperature depositions, RF was found to produce superior transmission and electrical characteristics.
Description: © 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Sponsor: The authors would like to acknowledge funding for the work through the EPSRC Supergen Supersolar Hub.
Version: Accepted for publication
DOI: 10.1109/PVSC.2015.7355900
URI: https://dspace.lboro.ac.uk/2134/20174
Publisher Link: http://dx.doi.org/10.1109/PVSC.2015.7355900
Appears in Collections:Conference Papers and Contributions (Mechanical, Electrical and Manufacturing Engineering)

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