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Title: Plastic deformation of micromachined silicon diaphragms with a sealed cavity at high temperatures
Authors: Ren, Juan
Ward, Michael
Kinnell, Peter
Craddock, Russell
Wei, Xueyong
Keywords: Pressure sensor
Plastic deformation
Single crystal silicon
Issue Date: 2016
Publisher: MDPI AG
Citation: REN, J. ...et al., 2016. Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures. Sensors, 16(2), 204.
Abstract: Single crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in both electrical and mechanical properties. To survive at the elevated temperature, the silicon structures must work in combination with other advanced materials, such as silicon carbide (SiC) or silicon on insulator (SOI), for improved performance and reduced cost. Hence, in order to extend the operating temperatures of existing SCS microstructures, this work investigates the mechanical behavior of pressurized SCS diaphragms at high temperatures. A model was developed to predict the plastic deformation of SCS diaphragms and was verified by the experiments. The evolution of the deformation was obtained by studying the surface profiles at different anneal stages. The slow continuous deformation was considered as creep for the diaphragms with a radius of 2.5 mm at 600 °C. The occurrence of plastic deformation was successfully predicted by the model and was observed at the operating temperature of 800 °C and 900 °C, respectively.
Description: This is an Open Access Article. It is published by MDPI AG under the Creative Commons Attribution 4.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/4.0/
Sponsor: This work was supported the National Natural Science Foundation of China (Grant No. 51575439).
Version: Published
DOI: 10.3390/s16020204
URI: https://dspace.lboro.ac.uk/2134/21386
Publisher Link: http://dx.doi.org/10.3390/s16020204
ISSN: 1424-8220
Appears in Collections:Published Articles (Mechanical, Electrical and Manufacturing Engineering)

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