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Title: Refractive index determination by coherence scanning interferometry
Authors: Yoshino, Hiro
Kaminski, Piotr M.
Smith, Roger
Walls, Michael
Mansfield, D.
Issue Date: 2016
Publisher: Optical Society of America
Citation: YOSHINO, H. ... et al., 2016. Refractive index determination by coherence scanning interferometry. Applied Optics, 55 (15), pp. 4253 - 4260.
Abstract: Coherence scanning interferometry is established as a powerful noncontact, three-dimensional, metrology technique used to determine accurate surface roughness and topography measurements with subnanometer precision. The helical complex field (HCF) function is a topographically defined helix modulated by the electrical field reflectance, originally developed for the measurement of thin films. An approach to extend the capability of the HCF function to determine the spectral refractive index of a substrate or absorbing film has recently been proposed. In this paper, we confirm this new capability, demonstrating it on surfaces of silicon, gold, and a gold/ palladium alloy using silica and zirconia oxide thin films. These refractive index dispersion measurements show good agreement with those obtained by spectroscopic ellipsometry
Description: Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article’s title, journal citation, and DOI.
Sponsor: Engineering and Physical Sciences Research Council (EPSRC) (EP/J017361/1, EP/M014297/1).
Version: Published
DOI: 10.1364/AO.55.004253
URI: https://dspace.lboro.ac.uk/2134/21700
Publisher Link: http://dx.doi.org/10.1364/AO.55.004253
ISSN: 1559-128X
Appears in Collections:Published Articles (Mechanical, Electrical and Manufacturing Engineering)

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