MCKAY, K. ... et al., 2011. Dynamics and particle fluxes in atmospheric-pressure electronegative radio frequency microplasmas. Applied Physics Letters, 99, 091501, doi: 10.1063/1.3631758.
We report on intricate dynamics observed in atmospheric-pressure rf electronegative discharges
where electrons and anions are separated due to their different mobilities. This results in the
formation of positively charged regions between an electronegative plasma core and an oscillating
electron ensemble. It is found that for a given input power, the electron, ion (both positive and
negative) and neutral fluxes increase as the gap size is reduced, resulting in a more efficient
delivery of chemical species to a treated target.
This work was supported by the Engineering Physical
Science Research Council of UK and the Fundamental
Research Funds for the Central Universities of China.