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Title: Dynamics and particle fluxes in atmospheric-pressure electronegative radio frequency microplasmas
Authors: McKay, Kirsty
Liu, Ding-Xin
Rong, Ming-Zhe
Iza, Felipe
Kong, Michael G.
Keywords: Plasma
Issue Date: 2011
Publisher: © American Institute of Physics
Citation: MCKAY, K. ... et al., 2011. Dynamics and particle fluxes in atmospheric-pressure electronegative radio frequency microplasmas. Applied Physics Letters, 99, 091501, doi: 10.1063/1.3631758.
Abstract: We report on intricate dynamics observed in atmospheric-pressure rf electronegative discharges where electrons and anions are separated due to their different mobilities. This results in the formation of positively charged regions between an electronegative plasma core and an oscillating electron ensemble. It is found that for a given input power, the electron, ion (both positive and negative) and neutral fluxes increase as the gap size is reduced, resulting in a more efficient delivery of chemical species to a treated target.
Sponsor: This work was supported by the Engineering Physical Science Research Council of UK and the Fundamental Research Funds for the Central Universities of China.
Version: Accepted for publication
DOI: 10.1063/1.3631758
URI: https://dspace.lboro.ac.uk/2134/22150
Publisher Link: http://dx.doi.org/10.1063/1.3631758
ISSN: 0003-6951
Appears in Collections:Published Articles (Mechanical, Electrical and Manufacturing Engineering)

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