RUIZ, P.D. and HUNTLEY, J.M., 2017. Single-shot areal profilometry using hyperspectral interferometry with a microlens array. Optics Express, 25(8), pp. 8801-8815.
We describe a single-shot technique to measure areal profiles on optically smooth and stepped surfaces for applications where rapid data acquisition in non-cooperative environments is essential. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In the current paper a >20-fold increase in pixel utilisation is achieved through the use of a 2-D microlens array, that leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm.
This paper was accepted for publication in the journal Optics Express and the definitive published version is available at https://doi.org/10.1364/OE.25.008801
This research was finded by the Royal Society (Industry Fellowship IF2012/R2) and the Engineering and Physical Sciences Research Council (EP/K018124/1).