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Title: High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit
Authors: Ruiz, Pablo D.
Huntley, Jonathan M.
Keywords: Height measurements
Metrology
Single-shot
Hyperspectral interferometry
Microlens array
Integral field unit
Issue Date: 2017
Publisher: © SPIE
Citation: RUIZ, P.D. and HUNTLEY, J.M., 2017. High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit. IN: Lehmann, P., Osten, W. and Goncalves, A.A. (eds.), SPIE Optical Metrology 2017; 23rd International Congress on Photonics in Europe, Munich, June 25-29th, Paper no. 103290G.
Abstract: A single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in non-cooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In this paper a >20-fold increase in pixel utilization is achieved through the use of a 2-D microlens array as proposed for integral field units in astronomy applications. This leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm.
Description: Copyright 2017 Society of Photo- Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited
Sponsor: P. D. Ruiz acknowledges The Royal Society (Industry Fellowship IF2012/R2) and industrial hosts Phase Vision Ltd. and Renishaw plc for their support. J. M. Huntley acknowledges the Engineering and Physical Sciences Research Council (EP/K018124/1) for its financial support.
Version: Accepted for publication
DOI: 10.1117/12.2272003
URI: https://dspace.lboro.ac.uk/2134/24829
Publisher Link: https://doi.org/10.1117/12.2272003
Related Resource: Optical Measurement Systems for Industrial Inspection X; 10329
Appears in Collections:Conference Papers and Presentations (Mechanical, Electrical and Manufacturing Engineering)

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