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Please use this identifier to cite or link to this item: https://dspace.lboro.ac.uk/2134/25630

Title: Multiphysics modeling approach for micro electro-thermo-mechanical actuator: failure mechanisms coupled analysis
Authors: Wang, Jinling
Zeng, Shengkui
Silberschmidt, Vadim V.
Guo, Jianbin
Keywords: Coupled failure mechanisms
FMMEA
Multiphysics modeling
μETMA
Issue Date: 2015
Publisher: © Elsevier
Citation: WANG, J. ... et al., 2015. Multiphysics modeling approach for micro electro-thermo-mechanical actuator: Failure mechanisms coupled analysis. Microelectronics Reliability, 55 (5), pp.771-782.
Abstract: The lifetime of micro electro-thermo-mechanical actuators with complex electro-thermo-mechanical coupling mechanisms can be decreased significantly due to unexpected failure events. Even more serious is the fact that various failures are tightly coupled due to micro-size and multi-physics effects. Interrelation between performance and potential failures should be established to predict reliability of actuators and improve their design. Thus, a multiphysics modeling approach is proposed to evaluate such interactive effects of failure mechanisms on actuators, where potential failures are pre-analyzed via FMMEA (Failure Modes, Mechanisms, and Effects Analysis) tool for guiding the electro-thermo-mechanical-reliability modeling process. Peak values of temperature, thermal stresses/strains and tip deflection are estimated as indicators for various failure modes and factors (e.g. residual stresses, thermal fatigue, electrical overstress, plastic deformation and parameter variations). Compared with analytical solutions and experimental data, the obtained simulation results were found suitable for coupled performance and reliability analysis of micro actuators and assessment of their design.
Sponsor: J. Wang would like to thank the Chinese Scholarship Council, China, for financial assistance.
Version: Accepted for publication
DOI: 10.1016/j.microrel.2015.02.012
URI: https://dspace.lboro.ac.uk/2134/25630
Publisher Link: http://dx.doi.org/10.1016/j.microrel.2015.02.012
ISSN: 0026-2714
Appears in Collections:Published Articles (Mechanical, Electrical and Manufacturing Engineering)

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