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Title: Physical vapour deposition of NbTiN thin films for superconducting RF cavities.
Authors: Wilde, Stuart
Valizadeh, Reza
Malyshev, O.B.
Stenning, G.B.G.
Hannah, A.
Pattalwar, S.
Pattalwar, N.
Barradas, N.P.
Alves, E.
Chesca, Boris
Issue Date: 2017
Publisher: © The Authors. Published by JACoW
Citation: WILDE, S. ...et al., 2017. Physical vapour deposition of NbTiN thin films for superconducting RF cavities. IN: Arduini, G. ...et al. (eds.). Proceedings of the 8th International Particle Accelerator Conference, (IPAC2017), Copenhagen, Denmark, 14-19th May, pp. 1102 - 1104.
Abstract: The production of superconducting coatings for radio frequency (RF) cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. The use of thin films made from superconductors with thermodynamic critical field, Hc > HC(Nb), allows the possibility of multilayer superconductor – insulator – superconductor (SIS) films and accelerators that could operate at temperatures above 2 K. SIS films theoretically allow increased acceleration gradient due to magnetic shielding of underlying superconducting layers [1] and higher operating temperature can reduce cost [2]. High impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering processes were used to deposit NbTiN thin films onto Si(100) substrate. The films were characterised using scanning electron microscopy (SEM), x-ray diffraction (XRD), Rutherford back-scattering spectroscopy (RBS) and a four-point probe.
Description: This is an Open Access Article. It is published by JACoW under the Creative Commons Attribution 3.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/3.0/
Version: Published
DOI: 10.18429/JACoW-IPAC2017-MOPVA104
URI: https://dspace.lboro.ac.uk/2134/26201
Publisher Link: http://accelconf.web.cern.ch/AccelConf/ipac2017/
ISBN: 9783954501823
Appears in Collections:Conference Papers (Physics)

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