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|Title: ||Combinatorial study of Sn-Ti-W-O transparent conducting oxide thin films for photovoltaic applications|
|Authors: ||Gona, Michael|
Isherwood, Patrick J.M.
Bowers, Jake W.
|Keywords: ||Transparent conducting oxides|
Amorphous thin films
Magnetron reactive sputtering
|Issue Date: ||2017|
|Citation: ||GONA, M. ...et al., 2017. Combinatorial study of Sn-Ti-W-O transparent conducting oxide thin films for photovoltaic applications. Presented at the 2017 IEEE 44th. Photovoltaic Specialists Conference (PVSC), Washington, D.C., June 25-30th, pp. 2349-2354.|
|Abstract: ||a combinatorial study of transparent conducting oxide thin films based on SnO2–TiO2-WO3 phase space is reported. These multinary oxide films were fabricated by magnetron reactive co-sputtering of tin monoxide (SnO), titanium (Ti) and tungsten (W) targets. SnO2–TiO2-WO3 film compositions with Ti/Sn ratio (0.02 – 0.12) and W/(Ti+Sn) ratio (0.02 – 0.25) were explored. The effect of oxygen partial pressure on composition, structure and optical properties was evaluated. High optical transparency above 80% across the visible spectrum was obtained for sputtered ternary SnO2-TiO2 oxide films for oxygen partial pressure >19.4%. A positive correlation between optical bandgap and Ti/Sn ratio was observed. However, optical properties deteriorated as Ti-content increased in the as-deposited SnO2-TiO2-WO3 films. All studied as-deposited SnO2-TiO2-WO3 thin films were found to be highly resistive. X-ray diffraction data indicated no long-range structural order.|
|Description: ||Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.|
|Version: ||Accepted for publication|
|Publisher Link: ||https://doi.org/10.1109/PVSC.2017.8521477|
|Appears in Collections:||Conference Papers and Presentations (Mechanical, Electrical and Manufacturing Engineering)|
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