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Title: Combinatorial study of Sn-Ti-W-O transparent conducting oxide thin films for photovoltaic applications
Authors: Gona, Michael
Isherwood, Patrick J.M.
Bowers, Jake W.
Walls, Michael
Keywords: Transparent conducting oxides
Amorphous thin films
Magnetron reactive sputtering
Combinatorial technique
Issue Date: 2017
Publisher: IEEE
Citation: GONA, M. ...et al., 2017. Combinatorial study of Sn-Ti-W-O transparent conducting oxide thin films for photovoltaic applications. Presented at the 2017 IEEE 44th. Photovoltaic Specialists Conference (PVSC), Washington, D.C., June 25-30th.
Abstract: a combinatorial study of transparent conducting oxide thin films based on SnO2–TiO2-WO3 phase space is reported. These multinary oxide films were fabricated by magnetron reactive co-sputtering of tin monoxide (SnO), titanium (Ti) and tungsten (W) targets. SnO2–TiO2-WO3 film compositions with Ti/Sn ratio (0.02 – 0.12) and W/(Ti+Sn) ratio (0.02 – 0.25) were explored. The effect of oxygen partial pressure on composition, structure and optical properties was evaluated. High optical transparency above 80% across the visible spectrum was obtained for sputtered ternary SnO2-TiO2 oxide films for oxygen partial pressure >19.4%. A positive correlation between optical bandgap and Ti/Sn ratio was observed. However, optical properties deteriorated as Ti-content increased in the as-deposited SnO2-TiO2-WO3 films. All studied as-deposited SnO2-TiO2-WO3 thin films were found to be highly resistive. X-ray diffraction data indicated no long-range structural order.
Description: This paper is in closed access until it is published.
Version: Accepted for publication
URI: https://dspace.lboro.ac.uk/2134/27050
Publisher Link: http://ieeexplore.ieee.org/Xplore/home.jsp
Appears in Collections:Closed Access (Mechanical, Electrical and Manufacturing Engineering)

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