In micro-structuring processes a direct structuring of the substrate is, in most cases, not
possible and therefore the profile is first obtained in photo resist and then, in a second step,
transferred into the substrate. The resist structuring can be performed using the flexible
characteristics of a laser pattern generator (LPG). In these processes, there is a beneficial
relationship between the apparatus/equipment expense and the obtainable processing results.
For a reproduceable processing result in all micro structuring tasks, good reproducibility of all
process relevant parameters is required. In the application of a laser pattern generator, precise
control of the focal position of the strongly focussed laser beam relative to the processing
surface must be maintained. [Continues.]
A Master's Thesis. Submitted in partial fulfilment of the requirements for the award of Master of Philosophy at Loughborough University.