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Title: Effects of the manufacturing process on the reliability of the multilayer structure in MetalMUMPs actuators: Residual stresses and variation of design parameters
Authors: Guo, Jianbin
Wang, Jinling
Zeng, Shengkui
Silberschmidt, Vadim V.
Shen, Yongguang
Keywords: Micro electromechanical systems (MEMS)
Residual stresses
Subdomain method
Manufacturing process
Multilayer structure
Issue Date: 2017
Publisher: © The Authors. Published by MDPI.
Citation: GUO, J. ...et al., 2017. Effects of the manufacturing process on the reliability of the multilayer structure in MetalMUMPs actuators: Residual stresses and variation of design parameters. Micromachines, 8(12): 348.
Abstract: © 2017 by the authors. Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP® actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their thermal expansions. In this research, residual stresses and variations of design parameters induced by metal multi-user micro electromechanical system processes (MetalMUMPs) were examined to evaluate their effects on the thermal fatigue lifetime of the multilayer structure and, thus, to improve MEMSCAP® design. Since testing in such micro internal structure is difficult to conduct and traditional testing schemes are destructive, a numerical subdomain method based on a finite element technique was employed. Thermomechanical deformation from metal to insulator layers under in-service temperature cycling (obtained from the multiphysics model of the entire actuator, which was validated by experimental and specified analytical solutions) was accurately estimated to define failures with a significant efficiency and feasibility. Simulation results showed that critical failure modes included interface delamination, plastic deformation, micro cracking, and thermal fatigue, similarly to what was concluded in the MEMSCAP® technical report.
Description: This is an Open Access Article. It is published by MDPI under the Creative Commons Attribution 4.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/4.0/
Sponsor: This work was jointly supported by the Mechanics of Advanced Materials Research Group in Loughborough University, UK and the Science and Technology on Reliability and Environmental Engineering Laboratory in Beihang University, China.
Version: Published
DOI: 10.3390/mi8120348
URI: https://dspace.lboro.ac.uk/2134/27987
Publisher Link: https://doi.org/10.3390/mi8120348
Appears in Collections:Published Articles (Mechanical, Electrical and Manufacturing Engineering)

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