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Please use this identifier to cite or link to this item: https://dspace.lboro.ac.uk/2134/28023

Title: Ion erosion in surface analysis
Authors: Duncan, S.
Issue Date: 1985
Publisher: © S. Duncan
Abstract: Low energy ion bombardment is a process used in surface analysis and in the electronics and telecommunications industries. Techniques such as Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectroscopy (SIMS) employ ion bombardment for surface cleaning and for the provision of composition-depth profiles. [Continues.]
Description: A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.
Sponsor: AERE Harwell. SERC.
Version: Not specified
URI: https://dspace.lboro.ac.uk/2134/28023
Appears in Collections:PhD Theses (Physics)

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