The work in this thesis examines the numerical modelling of
focussed ion beam systems, with applications ranging from the
surface analysis of materials by SIMS to microfabrication by ion
beam lithography. An efficient and accurate computer programme
has been developed and tested on medium sized machines in order
to model the behaviour of beams of charged particles through
electrostatic systems. [Continues.]
A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.
Science and Engineering Research Council and VG Ionex Ltd. (CASE award).