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Please use this identifier to cite or link to this item: https://dspace.lboro.ac.uk/2134/28312

Title: The numerical modelling of focussed ion beam systems
Authors: Amos, Robert J.
Issue Date: 1987
Publisher: © Robert J. Amos
Abstract: The work in this thesis examines the numerical modelling of focussed ion beam systems, with applications ranging from the surface analysis of materials by SIMS to microfabrication by ion beam lithography. An efficient and accurate computer programme has been developed and tested on medium sized machines in order to model the behaviour of beams of charged particles through electrostatic systems. [Continues.]
Description: A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.
Sponsor: Science and Engineering Research Council and VG Ionex Ltd. (CASE award).
URI: https://dspace.lboro.ac.uk/2134/28312
Appears in Collections:PhD Theses (Maths)

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