Ultra-clean process gases containing a very low level of
particulate contamination are required in many industrial
applications. This is particularly true in the Integrated Circuit
industry, where considerable care is taken in the installation of
gas delivery systems to clean rooms. However, virtually no
quantitative information is available on the release of aerosol
particles from the components which comprise such systems. An
experimental programme was undertaken to assess the level of
particle shedding from tubes and valves. [Continues.]
A master's thesis submitted in partial fulfilment of the requirements for the award of Master of Philosophy at Loughborough University.
Loughborough University[?], Centre for Engineering Research into Contamination Control.