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Please use this identifier to cite or link to this item: https://dspace.lboro.ac.uk/2134/31998

Title: Aerosol contamination of clean gases in tubes and valves
Authors: Arnold, Lesley D.
Issue Date: 1991
Publisher: © L.D. Arnold
Abstract: Ultra-clean process gases containing a very low level of particulate contamination are required in many industrial applications. This is particularly true in the Integrated Circuit industry, where considerable care is taken in the installation of gas delivery systems to clean rooms. However, virtually no quantitative information is available on the release of aerosol particles from the components which comprise such systems. An experimental programme was undertaken to assess the level of particle shedding from tubes and valves. [Continues.]
Description: A master's thesis submitted in partial fulfilment of the requirements for the award of Master of Philosophy at Loughborough University.
Sponsor: Loughborough University[?], Centre for Engineering Research into Contamination Control.
URI: https://dspace.lboro.ac.uk/2134/31998
Appears in Collections:MPhil Theses (Chemical Engineering)

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