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Low-power microwave plasma source based on a microstrip split-ring resonator
journal contribution
posted on 2008-02-22, 16:12 authored by Felipe Iza, Jeffrey A. HopwoodMicroplasma sources can be integrated into portable
devices for applications such as bio-microelectromechanical
system sterilization, small-scale materials processing, and microchemical
analysis systems. Portable operation, however, limits
the amount of power and vacuum levels that can be employed
in the plasma source. This paper describes the design and initial
characterization of a low-power microwave plasma source based
on a microstrip split-ring resonator that is capable of operating
at pressures from 0.05 torr (6.7 Pa) up to one atmosphere. The
plasma source’s microstrip resonator operates at 900 MHz and
presents a quality factor of Q = 335. Argon and air discharges
can be self-started with less than 3Win a relatively wide pressure
range. An ion density of 1.3 X 10(11) cm-3 in argon at 400 mtorr
(53.3 Pa) can be created using only 0.5W. Atmospheric discharges
can be sustained with 0.5 W in argon. This low power allows for
portable air-cooled operation. Continuous operation at atmospheric
pressure for 24 h in argon at 1 W shows no measurable
damage to the source.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Citation
IZA, F. and HOPWOOD, J.A., 2003. Low-power microwave plasma source based on a microstrip split-ring resonator. IEEE transactions on plasma science, 31 (4), pp. 782-787Publisher
© IEEEPublication date
2003Notes
This article was published in the journal IEEE transactions on plasma science [© IEEE] and is also available at: http://ieeexplore.ieee.org/servlet/opac?punumber=27 Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.ISSN
0093-3813Language
- en