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Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges
journal contribution
posted on 2008-02-25, 11:58 authored by G.Y. Park, S.J. You, Felipe Iza, Jae Koo LeeIn low-pressure capacitively coupled plasmas, high-energy electrons are collisionlessly heated by large
rf fields in the sheaths while low-energy electrons are confined in the bulk plasma by the ambipolar
potential. Low-energy electrons are typically inefficiently heated due to their low collisionality and the
weak rf electric field present in the bulk. It is shown, however, that as a result of the nonlinear interaction
between the electron motion and the weak rf field present in the bulk, low-energy electrons can be
efficiently heated. Electrons in the bulk that bounce inside the electrostatic potential well with a frequency
equal to the rf excitation frequency are efficiently heated by the coherent interaction with the rf field. This
resonant collisionless heating can be very efficient and manifest itself as a plateau in the electron energy probability function.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Citation
PARK., G.Y. ... et al, 2007. Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges. Physical review letters, 98 (8), 085003Publisher
© The American Physical SocietyPublication date
2007Notes
This article is Restricted Access. It was published in the journal, Physical review letters [© The American Physical Society] and is available at: http://prl.aps.org/ or http://dx.doi.org/10.1103/PhysRevLett.98.085003ISSN
0031-9007Language
- en