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Title: Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges
Authors: Park, G.Y.
You, S.J.
Iza, Felipe
Lee, Jae Koo
Issue Date: 2007
Publisher: © The American Physical Society
Citation: PARK., G.Y. ... et al, 2007. Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges. Physical review letters, 98 (8), 085003
Abstract: In low-pressure capacitively coupled plasmas, high-energy electrons are collisionlessly heated by large rf fields in the sheaths while low-energy electrons are confined in the bulk plasma by the ambipolar potential. Low-energy electrons are typically inefficiently heated due to their low collisionality and the weak rf electric field present in the bulk. It is shown, however, that as a result of the nonlinear interaction between the electron motion and the weak rf field present in the bulk, low-energy electrons can be efficiently heated. Electrons in the bulk that bounce inside the electrostatic potential well with a frequency equal to the rf excitation frequency are efficiently heated by the coherent interaction with the rf field. This resonant collisionless heating can be very efficient and manifest itself as a plateau in the electron energy probability function.
Description: This article is Restricted Access. It was published in the journal, Physical review letters [© The American Physical Society] and is available at: http://prl.aps.org/ or http://dx.doi.org/10.1103/PhysRevLett.98.085003
URI: https://dspace.lboro.ac.uk/2134/3224
ISSN: 0031-9007
Appears in Collections:Closed Access (Electronic, Electrical and Systems Engineering)

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