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Title: Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma : comparisons with experiments and validations
Authors: Lee, S.H.
Iza, Felipe
Lee, Jae Koo
Issue Date: 2006
Publisher: © American Institute of Physics
Citation: LEE, S.H., IZA, F. and LEE, J.K., 2006. Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma : comparisons with experiments and validations. Physics of plasmas, 13, 057102
Abstract: Particle-in-cell Monte Carlo collision (PIC-MCC) and fluid simulations of argon-oxygen plasmas in capacitively and inductively coupled plasma reactors are presented. Potential profiles and electron/ ion kinetic information such as electron/ion energy distributions and temperatures are compared with experimental data as well as with other analytical and numerical results. One-dimensional PIC-MCC simulations compare favorably with experimental data obtained in capacitively coupled reactors over a wide range of pressure and power. Two-dimensional fluid simulations of capacitive discharges differs from the results of PIC-MCC simulations as nonlocal effects play an important role in these discharges. Fluid simulations as nonlocal inductively coupled plasmas, however, agree favorably with experimental observations.
Description: This article was published in the journal, Physics of plasmas and is also available at: http://pop.aip.org/pop/top.jsp or http://dx.doi.org/10.1063/1.2179430
URI: https://dspace.lboro.ac.uk/2134/3227
ISSN: 1070-664X
Appears in Collections:Published Articles (Mechanical, Electrical and Manufacturing Engineering)

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