Thesis-1981-Makh.pdf (6.38 MB)
The development of surface morphology during ion etching
thesis
posted on 2018-05-25, 16:00 authored by Surinder S. MakhThis thesis investigates the changes in surface shape which
Occur when solid surfaces are subjected to bombardment and erosion by
Energetic ion beams. The aspects which are studied lay particular
emphasis on the type of problems encountered in the electronics
industry where ion etching is used for the production of micro-relief
on many commercial devices. Ion etching is also used extensively in
surface analysis using techniques such as Auger Electron Spectroscopy,
X-ray Photoelectron Spectroscopy and Secondary Ion Mass Spectroscopy
both for surface cleaning and composition-depth profiling. [Continues.]
Funding
Science Research Council and Plessey Company Ltd (CASE award).
History
School
- Science
Department
- Physics
Publisher
© S.S. MakhPublisher statement
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/Publication date
1981Notes
A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.Language
- en