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Title: Non-destructive defect detection for MEMS devices using transient thermography
Authors: Wang, Xiaoting
Whalley, David C.
Silberschmidt, Vadim V.
Issue Date: 2016
Publisher: © IEEE
Citation: WANG, X., WHALLEY, D.C. and SILBERSCHMIDT, V.V., 2016. Non-destructive defect detection for MEMS devices using transient thermography. Presented at the 2016 6th Electronic System-Integration Technology Conference (ESTC), Grenoble, France, 13-15 September 2016.
Abstract: This paper investigates the use of transient infrared thermography in a transmission mode for subsurface defect detection within thin multilayer structures such as those found in MEMS devices. This was undertaken through the use of finite element analysis based simulations for several sizes of defects and for several combinations of substrate and thin film materials. The maximum temperature difference observable at the sample surface between defective and non-defective regions of the sample was investigated as a function of various parameters of the sample materials and defect geometry.
Description: © 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Version: Accepted for publication
DOI: 10.1109/ESTC.2016.7764459
URI: https://dspace.lboro.ac.uk/2134/33941
Publisher Link: https://doi.org/10.1109/ESTC.2016.7764459
ISBN: 9781509014026
Appears in Collections:Conference Papers and Presentations (Mechanical, Electrical and Manufacturing Engineering)

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