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Title: Energetic deposition of thin metal films
Authors: Al-Busaidy, Mohamed S.K.
Issue Date: 2001
Publisher: © M.S. Al-Busaidy
Abstract: The primary aim of this thesis was to study the physical effect of energetic deposition on metal thin films. The secondary aim is to enhance the quality of the films produced to a desired quality. Grazing incidence X-ray reflectivity (GIXR) measurements from a high-energy synchrotron radiation source were carried out to study and characterise the samples. Optical Profilers Interferometry, Atomic Force Microscope (AFM), Auger electron spectroscopy (AES), Medium energy ion spectroscopy (MEIS), and the Electron microscope studies were the other main structural characterisation tools used. [Continues.]
Description: A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of the degree of Doctor of Philosophy at Loughborough University.
URI: https://dspace.lboro.ac.uk/2134/36128
Appears in Collections:PhD Theses (Physics)

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