The primary aim of this thesis was to study the physical effect of energetic deposition
on metal thin films. The secondary aim is to enhance the quality of the films produced
to a desired quality. Grazing incidence X-ray reflectivity (GIXR) measurements from a high-energy synchrotron radiation source were carried out to study and characterise
the samples. Optical Profilers Interferometry, Atomic Force Microscope (AFM),
Auger electron spectroscopy (AES), Medium energy ion spectroscopy (MEIS), and
the Electron microscope studies were the other main structural characterisation tools
A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of the degree of Doctor of Philosophy at Loughborough University.