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|Title: ||Surface measurement errors using commercial scanning white light interferometers|
|Authors: ||Gao, F.|
Leach, Richard K.
Petzing, Jon N.
Coupland, Jeremy M.
|Keywords: ||White light interferometry|
Surface roughness measurement
Multiple scattering effect
|Issue Date: ||2008|
|Publisher: ||© IOP PUBLISHING|
|Citation: ||GAO, F. ... et al, 2008. Surface measurement errors using commercial scanning white light interferometers. Measurement Science and Technology, 19, 015303 (13 pp.) [doi:10.1088/0957-0233/19/1/015303]|
|Abstract: ||This paper examines the performance of commercial scanning white light interferometers in a
range of measurement tasks. A step height artefact is used to investigate the response of the
instruments at a discontinuity, while gratings with sinusoidal and rectangular profiles are used
to investigate the effects of surface gradient and spatial frequency. Results are compared with
measurements made with tapping mode atomic force microscopy and discrepancies are
discussed with reference to error mechanisms put forward in the published literature. As
expected it is found that most instruments report errors when used in regions close to a
discontinuity or those with a surface gradient that is large compared to the acceptance angle
of the objective lens. Amongst other findings, however, we report systematic errors that are
observed when the surface gradient is considerably smaller. Although these errors are
typically less than the mean wavelength they are significant compared to the instrument
resolution and indicate that current scanning white light interferometers should be used with
some caution if sub-wavelength accuracy is required.|
|Description: ||This journal article was published in the journal, Measurement Science and Technology [© IOP Publishing]. The definitive version is available at: http://www.iop.org/EJ/journal/0957-0233|
|Appears in Collections:||Published Articles (Mechanical, Electrical and Manufacturing Engineering)|
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