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|Title: ||Radio-frequency dielectric-barrier glow discharges in atmospheric argon|
|Authors: ||Shi, J.J.|
Kong, Michael G.
|Issue Date: ||2007|
|Publisher: ||© American Institute of Physics|
|Citation: ||SHI, J.J and KONG, M.G., 2007. Radio-frequency dielectric-barrier glow discharges in atmospheric argon. Applied Physics Letters, 90 (11), article 111502, pp. 1-3.|
|Abstract: ||In this letter, an experimental investigation is presented to characterize the properties and benefits of radio-frequency (rf) dielectric-barrier discharges (DBDs) in atmospheric argon. Compared to rf atmospheric glow discharges generated with bare electrodes, atmospheric argon rf DBDs are shown to remain stable and uniform over a large current range from the α and the γ modes. Optical emission spectroscopy is used to show an active underpinning plasma chemistry and a gas temperature range of 461–562 K. These highlight the advantages of argon rf DBD as a surface processing technique over more expensive helium-based rf atmospheric glow discharges.|
|Description: ||Copyright 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the authors and the American Institute of Physics. This article appeared in the journal, Applied Physics Letters, and may be found at: http://link.aip.org/link/?APPLAB/90/111502/1|
|Appears in Collections:||Published Articles (Electronic, Electrical and Systems Engineering)|
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