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Title: Contrasting characteristics of linear-field and cross-field atmospheric plasma jets
Authors: Walsh, James L.
Kong, Michael G.
Keywords: Plasma chemistry
Plasma flow
Plasma jets
Plasma transport processes
Polymer films
Sputter etching
Issue Date: 2008
Publisher: © American Institute of Physics
Citation: WALSH, J.L. and KONG, M.G., 2008. Contrasting characteristics of linear-field and cross-field atmospheric plasma jets. Applied Physics Letters, 93 (11), article 111501, pp. 1-3.
Abstract: This letter reports an experimental study of two types of atmospheric pressure plasma jets in terms of their fundamental properties and their efficiency in etching polymeric materials. The first plasma jet has a cross-field configuration with its electric field perpendicular to its gas flow field, whereas the second is a linear-field device having parallel electric and flow fields. The linear-field jet is shown to drive electron transportation to the downstream application region, thus facilitating more active plasma chemistry there. This is responsible for its etching rate of polyamide films being 13-fold that of its cross-field counterpart.
Description: Copyright 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the authors and the American Institute of Physics. This article appeared in the journal, Applied Physics Letters, and may be found at: http://link.aip.org/link/?APPLAB/93/111501/1
Version: Published
DOI: 10.1063/1.2982497
URI: https://dspace.lboro.ac.uk/2134/5198
ISSN: 0003-6951
1077-3118
Appears in Collections:Published Articles (Electronic, Electrical and Systems Engineering)

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