Shi_Kong_2005_IEEE_33-2.pdf (317.52 kB)
Mode characteristics of radio-frequency atmospheric glow discharges
journal contribution
posted on 2009-08-27, 11:16 authored by J.J. Shi, Michael G. KongBuilding on recent experimental and numerical evidence
of different glow modes in atmospheric plasmas, this paper
reports a systematic study of these modes in radio-frequency (RF)
glow discharges in atmospheric helium. Using a one-dimensional
(1-D) hybrid computer model, we present detailed characterization
of three glow modes, namely the α mode, the α - γ transitional
mode, and the γ-mode in a 13.56-MHz atmospheric glow
discharge over a wide range of root mean square (RMS) current
density from 5 m A / cm2 to 110 m A / cm2. Our focus is on sheath
dynamics through spatial and temporal profiles of charged densities,
electric field, electron mean energy, sheath thickness, and
sheath voltage, and when appropriate our results are compared
against experimental data of atmospheric glow discharges and that
of glow discharges at reduced gas pressure below 1 torr. Fundamental
characteristics of the three glow modes are shown to be distinctively
different, and these can be used as a hitherto unavailable
route to tailor the operation of radio-frequency atmospheric glow
discharges to their intended applications.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Citation
SHI, J.J. and KONG, M.G., 2005. Mode characteristics of radio-frequency atmospheric glow discharges. IEEE Transactions on Plasma Science, 33(2), pt.2, pp. 624-630.Publisher
© IEEEVersion
- VoR (Version of Record)
Publication date
2005Notes
This article was published in the journal, IEEE Transactions on Plasma Science [© 2005 IEEE] and is also available at: http://ieeexplore.ieee.org/ Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.ISSN
0093-3813Language
- en