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Please use this identifier to cite or link to this item: https://dspace.lboro.ac.uk/2134/8349

Title: Hyperspectral interferometry for single-shot profilometry and depth-resolved displacement field measurement
Authors: Widjanarko, Taufiq
Keywords: Hyperspectral interferometry
Single-shot measurement
Profilometry
Depth-resolved displacement field measurement
Absolute distance measurement
Phase measurement
Low coherence interferometry
Optical coherence tomography
Issue Date: 2011
Publisher: © Taufiq Widjanarko
Abstract: A new approach to the absolute measurement of two-dimensional optical path differences is presented in this thesis. The method, which incorporates a white light interferometer and a hyperspectral imaging system, is referred to as Hyperspectral Interferometry. A prototype of the Hyperspectral Interferometry (HSI) system has been designed, constructed and tested for two types of measurement: for surface profilometry and for depth-resolved displacement measurement, both of which have been implemented so as to achieve single shot data acquisition. The prototype has been shown to be capable of performing a single-shot 3-D shape measurement of an optically-flat step-height sample, with less than 5% difference from the result obtained by a standard optical (microscope) based method. The HSI prototype has been demonstrated to be able to perform single-shot measurement with an unambiguous 352 (m depth range and a rms measurement error of around 80 nm. The prototype has also been tested to perform measurements on optically rough surfaces. The rms error of these measurements was found to increase to around 4× that of the smooth surface. For the depth-resolved displacement field measurements, an experimental setup was designed and constructed in which a weakly-scattering sample underwent simple compression with a PZT actuator. Depth-resolved displacement fields were reconstructed from pairs of hyperspectral interferograms. However, the experimental results did not show the expected result of linear phase variation with depth. Analysis of several possible causes has been carried out with the most plausible reasons being excessive scattering particle density inside the sample and the possibility of insignificant deformation of the sample due to insufficient physical contact between the transducer and the sample.
Description: A Doctoral Thesis. Submitted in partial fulfillment of the requirements for the award of Doctor of Philosophy of Loughborough University.
URI: https://dspace.lboro.ac.uk/2134/8349
Appears in Collections:PhD Theses (Mechanical and Manufacturing Engineering)

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