Transmission through optically generated inductive grid arrays

Lockyer, David S.; Vardaxoglou, J. C.; Kearney, Michael J.

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Transmission through optically generated inductive grid arrays

journal contribution

posted on 2012-03-09, 14:18 authored by David S. Lockyer, J. C. Vardaxoglou, Michael J. Kearney

A technique is developed for generating pseudometallic plasma inductive grid arrays within a semiconductor wafer. The induced plasma elements are defined by a surface impedance which is discussed. Results of an investigation into the transmission properties of a variety of array designs between 16 and 40 GHz are presented. Measurements are performed on a silicon wafer illuminated by an external optical source via a negative image mask

History

School

Mechanical, Electrical and Manufacturing Engineering

Citation

LOCKYER, D.S., VARDAXOGLOU, J.C. and KEARNEY, M.J., 1999. Transmission through optically generated inductive grid arrays. IEEE Transactions on Microwave Theory and Techniques, 47(7), pp.1391-1397

Publisher

Version

VoR (Version of Record)

Publication date

1999

Notes

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